• Y. Sarov, A. Frank, Tzv. Ivanov, J-P. Zöllner, K. Ivanova, B. Volland, I.W. Rangelow, A. Brogan, R.Wilson, P. Zawierucha, M. Zielony, T. Gotszalk, N. Nikolov, M. Zier, B. Schmidt, I. Kostic
  "Parallel Proximal Probe Arrays with Vertical Interconnections"
  submitted to J. Vac. Sci. Technol. B (2009)

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Period covered: from 01-04-2008 to 31-03-2009

• Y. Sarov, A. Frank, Tzv. Ivanov, J-P. Zöllner, K. Ivanova, B. Volland, I.W. Rangelow, A. Brogan, R.Wilson, P. Zawierucha, M. Zielony, T. Gotszalk, N. Nikolov, M. Zier, B. Schmidt, I. Kostic
  "Parallel Proximal Probe Arrays with Vertical Interconnections"
  poster presentation at 53rd International Conference On Electron, Ion, And Photon Beam Technology & Nanofabrication, Marco Island, USA, May 26 – May 29, 2009

• P. Zawierucha, M. Zielony, M. Woszczyna, T. Gotszalk, Y. Sarov, A. Frank, Tz. Ivanov, J-P. Zöllner, Ivo W. Rangelow
  "Parallel imaging with micromachined thermally driven piezoresistive proximal probes"
  poster presentation at 53rd International Conference On Electron, Ion, And Photon Beam Technology & Nanofabrication, Marco Island, USA, May 26 – May 29, 2009

• Y. Sarov, A. Frank, Tz. Ivanov, J.-P. Zöllner, Ivo W. Rangelow
  "New generation cantilever arrays with vertical interconnections for large-scale parallel proximity surface scanning"
  presented at 54th IWK (Internationales Wissenschaftliches Kolloquium), Workshop „PRONANO”, TU-Ilmenau, 10 Sept. 2009

• T. Sulzbach, W. Engl, R. Maier, P. Besmens, D. Dontsov, E. Langlotz, W. Schott
  "Individually addressable cantilever arrays with integrated sharp tips for parallel surface scanning", presented at 54th IWK (Internationales Wissenschaftliches Kolloquium), Workshop „PRONANO” "
  TU-Ilmenau, 10 Sept. 2009

• N. Nikolov, P.Popov, T. Gotszalk, M. Woszczyna, I. Rangelow
  "Self-oscillation technology in multicantilever scanning systems"
  presented at 54th IWK (Internationales Wissenschaftliches Kolloquium), Workshop „PRONANO”, TU-Ilmenau, 10 Sept. 2009

• B. Schmidt, M. Zier, J. Potfajova
  "Ion implantation in AFM cantilever array fabrication"
  presented at 54th IWK (Internationales Wissenschaftliches Kolloquium), Workshop „PRONANO”, TU-Ilmenau, 10 Sept. 2009

• I. Kostic, V. Barak, A. Bencurova, I. Caplovic, P. Hrkut, A. Konecnikova, L. Matay, P. Nemec, A. Ritomsky
  "E-beam lithography for photomask fabrication"
  presented at 54th IWK (Internationales Wissenschaftliches Kolloquium), Workshop „PRONANO”, TU-Ilmenau, 10 Sept. 2009

• Y. Sarov, Tzv. Ivanov, A. Frank, B.E. Volland, I.W. Rangelow
  "Controllable Pre-deflection of Scanning Proximity Probes Arrays"
  Applied Physics A - Materials Science & Processing, 9. May 2008

• K. Ivanova, Y. Sarov, Tzv. Ivanov, A. Frank, J.-P. Zöllner, Ch. Bitterlich, U. Wenzel, B.E. Volland, S. Klett ,I.W. Rangelow, P. Zawierucha, M. Zielony , T. Gotszalk, D.  Dontzov ,W. Schott, N. Nikolov, M. Zier, B. Schmidt, W. Engl, T. Sulzbach and I. Kostic
  "Scanning proximal probes for parallel imaging and lithography"
  J. Vac. Sci. Technol. B 26(6), Nov/Dec 2008, pp. 2367-2373

• N. Nikolov, N. Kenarov, P. Popov, Th. Gotszalk and I.W. Rangelow
  "All-digital PLL System for Self-oscillation Mode of Microcantilevers with Integrated Bimorph Actuator and Piezoresistive Readout"
  Sensors & Transducers Journal, Vol. 98, Issue 11, November 2008, pp. 45-53

• A.Frank, J.-P. Zöllner, Y. Sarov, Tz. Ivanov, St. Klett, T. Gotszalk, M. Zielony, P. Zawierucha, B. Schmidt, M. Zier, M. Nikolov, W. Engl, T. Sulzbach, D. Dontsov, E. Langlotz, W. Schott and I.W. Rangelow
  "Investigation of Crosstalk in Cantilever Arrays"
  Proceedings Eurosensors / XXII, Dresden, Germany, pp. 744-747, 2008

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Period covered: from 01-04-2007 to 31-03-2008

• A. Frank, J.-P. Zöllner, Y. Sarov, Tz. Ivanov, S. Klett and I. W. Rangelow, M. Swiatkowski and T. Gotszalk, N. Nikolov
  "Compact Modelling of Electrical, Mechanical and Thermal Behaviour for MEMS with SPICE"
  accepted presentation at MRS Spring Meeting 2008, San Francisco, USA, 24-28.03.2008

• Wolfgang Engl, Thomas Sulzbach and Reinhard Maier
  „PRONANO - Active Cantilever Arrays for Parallel Atomic Force Microscopy”
  Nanomechanical Cantilever Sensors (NMC), Mainz, Germany, May 19-21, 2008

• Denis Dontsov, Enrico Langlotz, Walter Schott, Tino Hausotte, Eberhard Manske and Gerd Jäger
  “High precision platform for testing of the multi-sensor array parameters”
  Nanomechanical Cantilever Sensors (NMC), Mainz, Germany, May 19-21, 2008

• Teodor Gotszalk (Wroclaw University of Technology), I. W. Rangelow (TU Ilmenau), T. Sulzbach (Nanowold)
  “PRONANO cantilevers-principle of piezoresitive detection of cantilever bending & thermal actuation of tip deflection”
  Nanomechanical Cantilever Sensors (NMC), Mainz, Germany, May 19-21, 2008

• T. Gotszalk (WRUT) + consortium members
  “Application of self-actuated 32 cantilever array in atomic force surface measurements”
  MNE 2008, Athens, Greece, September 15-18, 2008

• R. Dunn, R. Ibbotson, S. E. Huq
  “Polyimide Based Bimorph Microcantilever Arrays with Integrated Actuation and Sensors”
  MNE 2008, Athens, Greece, September 15-18, 2008

• " Piezoresistive and Self-Actuated 128-Cantilever Arrays for Nanotechnology Applications"
  I.W. Rangelow, Tzv. Ivanov , K. Ivanova, B.E. Volland, Y. Sarov, A. Persaud, H.P. Reithmaier, T. Gotszalk, P. Zawierucha, M. Zielony, D. Dontzov, B. Schmidt, M. Zier, N. Nikolov, I. Kostic, W. Engl, T. Sulzbach, J. Mielczarski, S. Kolb, Du P. Latimier, R. Pedreau, V. Djakov, S.E. Huq, K. Edinger, O. Fortagne, A. Almansa, H-O. Blom
  MEE 84 5-8 (2007) 1260-1264

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Period covered: from 01-04-2005 to 31-03-2006

• Z. Rozynek, N. Zhang, S. Serra, A. Almansa, P. Castillo, V. Djacov, E.Huq.
  "Integration and packaging of micro-devices with vertical interconnection and simulation of thermal management"
  The International Workshop on Micro- and Nanotechnologies and Systems, 17-18 October 2007, Moscow

• A. Frank, J.-P. Zoellner, Y. Sarov, Tz. Ivanov, I. W. Rangelow, M. Swiatkowski, T. Gotszalk, N. Nikolov,
  M. Zier and B. Schmidt,
  "SPICE simulations of self-actuated piezoresistive cantilever arrays"
  Micro- and Nano-Engineering, 23-26 September 2007, Copenhagen

• Y. Sarov, Tzv. Ivanov, A. Frank, B.E. Volland, I.W. Rangelow
  "Controllable Pre-deflection of Scanning Proximity Probes Arrays"
  Micro- and Nano-Engineering, 23-26 September 2007, Copenhagen

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Period covered: from 01-04-2005 to 31-03-2006
During the first period a remarkable progress towards the overall aim of massively parallel addressable cantilever arrays have been achieved. First working arrays of up to 4x32 cantilevers have been realized (Uni Kassel) enabling experiments focussing on the fundamental understanding of parallel operation of cantilevers... read full text »

• Rangelow, I.W. and other;
  Piezoresistive and Self-Actuated 128-Cantilever Arrays for Nanotechnology Applications
  Micro- and Nano-Engineering, 17 - 20 September 2006, Barcelona
• Zier,M. and other
  Ultra-shallow pn-junction fabrication for piezoresistive AFM deflection sensors
  Micro- and Nano-Engineering, 17 - 20 September 2006, Barcelona
• "Raster-Sonden-Mikroskopie mit Cantilever-Arays"
  I. W. Rangelow, T. Ivanov, B. Volland, D. Donstov, Y. Sarov, K. Ivanova, A. Persaud, D. Filenko,
  N. Nikolov, B. Schmidt, M. Zier, T. Gotszalk, T. Sulzbach
  Techn. Mess. 73 (2006) 485-492 - in German.

• E. Mielczarski, J.A. Mielczarski
  "Composition and structure of thin films. Spectral simulation and experimental results"
  European Materials Research Society Spring Meeting, May 31 - June 3 2005, Strasbourg
• T. Sulzbach
  "PRONANO - Technology for the Production of Massively Parallel Intelligent Cantilever - Probe Platforms for Nanoscale Analysis and Synthesis"
  Conference on Advanced Manufacturing, 15 - 17 November 2005, Leuven