• A. Frank, J.-P. Zöllner, Y. Sarov, Tz. Ivanov, I. W. Rangelow, N. Nikolov, M. Swiatkowski and T. Gotszalk , Ivan Chakarov,
  "Crosstalk effects in self-actuated piezoresistive cantilever arrays"
  submitted to IEEE JMEMS (2010).
• W. Rangelow, Tz. Ivanov, Y. Sarov, A. Schuh, A. Frank, H. Hartmann, J. Zöllner, D. Olynick, V. Kalchenko,
  "Nanoprobe maskless lithography"
  Proc. SPIE, 7637 (2010) 76370V-1-10, doi:10.1117/12.852265
• A. Frank, J.-P. Zöllner, Y. Sarov; T. Ivanov, I. Rangelow, M. Woszczyna, P. Zawierucha; T. Gotszalk,
  "PRONANO: Schlüsseltechnologie zur Analyse und Manipulation in der Nano-Technologie mittels paralleler Cantilever-Arrays"
  proceedings of 2. Landshuter Symposium Mikrosystemtechnik, 24-25.Feb. 2010, Lanshut, Germany, (ed. Prof. H. Gesch, U. Vogl, Th. Weber-Reichart (Cluster Mikrosystemtechnik)), ISBN 978-3-00-030325-8- in German.
• G. Bischoff, K.-H. Drüe, J. Müller, Y. Sarov, A. Frank, J.-P. Zöllner, Tzv. Ivanov, I.W. Rangelow, M. Woszczyna, P. Zawierucha, M. Zielony und T. Gotszalk,
  "Packaging von selbstaktuierten piezoresistiven Cantilever-Arrays",
  proceedings of 2. Landshuter Symposium Mikrosystemtechnik, 24-25.Feb. 2010, Lanshut, Germany, (ed. Prof. H. Gesch, U. Vogl, Th. Weber-Reichart (Cluster Mikrosystemtechnik)), ISBN 978-3-00-030325-8- in German.
• A. Schneider, B. Ibbotson, R.J Dunn, E Huq
  "Arrays of SU-8 Microcantilevers with Integrated Piezoresistive Sensors for Parallel AFM Applications"
  Microelectronics Engineering (2010)
• A. Schneider, B. Ibbotson, R.J Dunn, E Huq "Arrays of SU-8 Microcantilevers with Integrated Piezoresistive Sensors for Parallel AFM Applications" Microelectronics Engineering (2010)
  "Micromachined scanning proximal probes with integrated piezoresistive readout and bimetal actuator for high eigenmode operation"
  submitted to J. Vac. Sci. Technol. B (2010)
• A. Frank, Tz. Ivanov, Y. Sarov, J-P. Zöllner, G. Bischoff, I. W. Rangelow, P. Zawierucha c, M. Zielony and T. Gotszalk, N. Nikolov,
  "Parallel Cantilever Systems for Scanning and Analysis"
  proc. Sensoren und Messsysteme 2010, 18-19.05.2010 Nürnberg, Germany, C VDE VERLAG GMBH, Berlin und Offenbach, Bismarkstraße 33, 10625 Berlin, ISBN 978-3-8007-3260-9, (2010) 334-338.
• C.Bitterlich, T.Ivanov, Y.Sarov, V.Sarova, J.-P. Zöllner, U.Wenzel, I.W.Rangelow, M.Höche, W.Hummel,
  "Self-actuated micro-cantilever array with piezoresistive readout for multi-parameter recognition"
  proc. Sensoren und Messsysteme 2010, 18-19.05.2010 Nürnberg, Germany, C VDE VERLAG GMBH, Berlin und Offenbach, Bismarkstraße 33, 10625 Berlin, ISBN 978-3-8007-3260-9, (2010) 306-310.
• Y. Sarov T. Ivanov, A. Frank, J.-P. Zöllner, and I. W. Rangelow,
  "Thermally driven multi-layer actuator for 2D cantilever arrays"
  submitted in Appl. Phys. A (2010).
• R. J. Dunn, V. Djakov, A. Persaud
  Introduction to Microcantilever Applications,
  ISBN 978-3-86991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 11
• R. J. Dunn, T. Sulzbach, I. W. Rangelow
  Microcantilever Deflection Measurements
  ISBN 978-3-86991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 57
• I. W. Rangelow, Tzv. Ivanov, Y. Sarov, J.-P. Zöllner, A. Frank, T. Gotszalk
  Basic Principles of Self-actuated Piezoresistive SPM-Cantilevers
  ISBN 978-3-86991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 89.
• I. Kostic, A. Bencurova, V. Barak, A. Ritomsky, A. Konecnikova, P. Nemec, R. Andok, L. Matay,
  Investigation of Exposure Parameters of E-Beam Resists for Photomasks Fabrication
  ISBN 978-3-86991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 99.
• B. Schmidt, M. Zier, J. Potfajova, P. Philipp
  Ion Implantation in AFM Cantilever Array Fabrication
  ISBN 978-3-86991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 111
• W. Schumann, B. Volland, I. W. Rangelow
  Development of a plasma etching process for vertical interconnections using DoE
  ISBN 978-3-86991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 119
• W. Engl, T. Sulzbach, R. Maier, P. Besmens
  AFM Cantilever Probes with Integrated Thermal Bimorph Actuator, Piezoresistive Beam Deflection Sensor and Sharp High Aspect Ratio Silicon Tip
  ISBN 978-3-86991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 131
• T. Sulzbach, W. Engl, R. Maier, P. Besmens, D. Dontsov, E. Langlotz, W. Schott
  Individually Addressable Cantilever Arrays with Integrated Sharp Tips for Parallel Surface Scanning
  ISBN 978-3-86991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 139
• R. J. Dunn, R. H. Ibbotson, V. Djakov, E. Huq, N. Nikolov
  Polyimide Bimorph Microcantilevers with Integrated Thermal Actuation and Piezoresistive Sensors
  ISBN 978-3-86991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 151
• Y. Sarov, T. Ivanov, A. Frank, V. Sarova, U. Wenzel, J.-P. Zöllner, I. W. Rangelow, N. Nikolov, P. Zawierucha, M. Woszczyna, T. Gotszalk
  Fabrication of Parallel Cantilever Systems with Sharp AFM Tips for Surface Scanning and Analysis
  ISBN 978-3-86991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 163
• A. Frank, J.-P. Zöllner, Y. Sarov, Tz. Ivanov, I. W. Rangelow
  Suppression of Cross-Talk Effects of Self Actuated Piezoresisitive SPM-Cantilever Arrays
  ISBN 978-3-86991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 169
• Y. Sarov, T. Ivanov, A. Frank, V. Sarova, J.-P. Zöllner, I. W. Rangelow
  Micro-machined Parallel up to 8x64 Cantilever Arrays with Planar and Vertical Interconnections for Large Area Imaging
  ISBN 978-3-86991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 179
• P. Zawierucha, M. Woszczyna, M. Zielony, D. Kopiec, G. Jóźwiak, K. Garczyński, T. Gotszalk, Y. Sarov, T. Ivanov, A. Frank, J.-P. Zöllner, I. W. Rangelow, R. Pedrau, P. E. Latimier, N. Nikolov
  Measurement and Control System for PRONANO 1D Cantilever Arrays
  ISBN 978-3-86991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 209
• N. Kenarov, N. Nikolov, P. Popov, Ivo W. Rangelow, T. Gotszalk
  FPGA based High-Throughput Data Transfer System for Large SPM Arrays
  ISBN 978-3-86991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 217
• N. Nikolov, N. Kenarov, P. Popov, T. Gotszalk, M. Woszczyna, P. Zawierucha, I. W. Rangelow, Y. Sarov
  Self-Oscillation Technology for Cantilever SPM Array
  ISBN 978-3-86991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 225
• D. Dontsov, E. Langlotz, W. Schott, W. Pöschel
  Applications of the Nanomeasuring and Nanopositioning Machine in PRONANO Project
  ISBN 978-3-86991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 233
• M. Woszczyna, P. Zawierucha, P. Pałetko, M. Zielony, T. Gotszalk, Y. Sarov, T. Ivanov, A Frank, J.-P. Zöllner, I. W. Rangelow
  High Eigenmode Operation of Cantilevers with Integrated Piezoresistive Readout and Bimetal Actuator
  ISBN 978-3-86991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 243
• R. J. Dunn, E. Huq
  Surface Imaging using Polyimide Scanning Probe Arrays
  ISBN 978-3-86991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 255
• A. Schneider, R. H. Ibbotson, R. J. Dunn, V. Djakov, E. Huq, T. Gotszalk
  Parallel Imaging with Arrays of SU-8 Microcantilevers
  ISBN 978-3-86991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 265.
• M. Zielony, P. Zawierucha, M. Woszczyna, G. Jóźwiak, T. Gotszalk, Y. Sarov, T. Ivanov, A Frank, J.-P. Zöllner, I. W. Rangelow
  Large Area Surface Measurements using PRONANO Array Cantilevers
  ISBN 978-3-86991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 273
• S. Kolb, B. Winkler, W. Schott, D. Dontsov, E. Langlotz
  Semiconductor Surface Analysis using a Multiple Tip AFM Tool
  ISBN 978-3-86991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 279
• S. Kolb, A. Niklas, H. Theuss, B. Winkler, U. Fakesch, I. W. Rangelow, O. Blom
  Semiconductor Surface Analysis using a Multiple Tip AFM Tool
  Two Chip Integration of Sensor and ASIC using a Modular Through Silicon Via Concept 287
• U. Wenzel, T. Ivanov, I. W. Rangelow, D. F. Ogletree
  Integration of Self-actuating Piezoresistive Cantilever based AFM into SEM
  ISBN 978-3-86991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 295
• A. Schuh, Y. Sarov, Tzv. Ivanov, I. W. Rangelow, C. D. Weis, A. Batra, A. Persaud, T. Schenkel
  Self-actuated Piezoresistive Cantilever based AFM for Single Ion Implantation
  ISBN 978-3-86991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 299
• J. Schwartz, Ch. Bitterlich, V. Sarova, Ph. Michaelides, J. Frank, Y. Sarov, Tzv. Ivanov, J.-P. Zöllner, I. W. Rangelow, M. Höche, W. Hummel, N. Nikolov
  Pressure, Relative Humidity and Temperature Measurement using Microcantilevers with Integrated Bimorph Actuator and Piezo-resistive Read-out
  ISBN 978-3-86991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 307
• J. A. Mielczarski, Y. L. Jeyachandran, E. Mielczarski, T. Gotszalk, I. W. Rangelow, N. Nikolov
  In situ study of adsorption/desorption of protein on self-actuated piezoresistive SPM- cantilever
  ISBN 978-3-86991-177-9, Verlagshaus Monsenstein und Vannerdat OHG Muenster, (2010) 317

• I. W. Rangelow, Tz. Ivanov, Y. Sarov, A. Schuh, A. Frank, H. Hartmann, J. Zöllner, D. Olynick, V. Kalchenko,
  "Nanoprobe maskless lithography"
  invited lecture atconference- SPIE- "Alternative Lithographic Technologies II", 23-25 Feb 2010, San Jose California USA.
• A. Frank, J.-P. Zöllner, Y. Sarov; T. Ivanov, I. Rangelow, M. Woszczyna, P. Zawierucha; T. Gotszalk,
  "PRONANO: Schlüsseltechnologie zur Analyse und Manipulation in der Nano-Technologie mittels paralleler Cantilever-Arrays"
  oral presentation at 2. Landshuter Symposium Mikrosystemtechnik, 24-25.Feb. 2010, Lanshut, Germany
• G. Bischoff, K.-H. Drüe, J. Müller, Y. Sarov, A. Frank, J.-P. Zöllner, Tzv. Ivanov, I.W. Rangelow, M. Woszczyna, P. Zawierucha, M. Zielony und T. Gotszalk,
  "Packaging von selbstaktuierten piezoresistiven Cantilever-Arrays"
  oral presentation at 2. Landshuter Symposium Mikrosystemtechnik, 24-25.Feb. 2010, Lanshut, Germany.
• M. Woszczyna, P. Zawierucha, P. Pałetko, M. Zielony, T. Gotszalk, Y. Sarov, Tz. Ivanov, A. Frank, J.-P. Zoellner, I. W. Rangelow,
  "Micromachined scanning proximal probes with integrated piezoresistive readout and bimetal actuator for high eigenmode operation"
  presented at the 54th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN), Anchorage, Alaska, June 1 - 4, 2010.
• Thomas Sulzbach, Wolfgang Engl, Reinhard Maier,
  Individually addressable Cantilever Arrays for Parallel Atomic Force Microscopy,
  Nanotech Conference, Anaheim, 2010
• Thomas Sulzbach, Wolfgang Engl, Reinhard Maier, JörgDiebel, Denis Dontsov, Enrico Langlotz, Walter Schott,
  Cantilever Arrays with Integrated Actuation and Sensing for Parallel SPM,
  Eurosensors 24, Linz, 2010
• A. Frank, Tz. Ivanov, Y. Sarov, J-P. Zöllner, G. Bischoff, I. W. Rangelow, P. Zawierucha c, M. Zielony and T. Gotszalk, N. Nikolov,
  "Parallel Cantilever Systems for Scanning and Analysis"
  oral presentation at. Sensoren und Messsysteme 2010, 18-19.05.2010 Nürnberg, Germany
• C.Bitterlich, T.Ivanov, Y.Sarov, V.Sarova, J.-P. Zöllner, U.Wenzel, I.W.Rangelow, M.Höche, W.Hummel,
  "Self-actuated micro-cantilever array with piezoresistive readout for multi-parameter recognition"
  oral presentation at. Sensoren und Messsysteme 2010, 18-19.05.2010 Nürnberg, Germany
• R Dunn & A Schneider
  "Polymer Scanning Probes"
  UK SPM 2010, Oral Presentation, (July 2010)
• A Schneider, B Ibbotson, R Dunn, E Huq
  "Arrays of SU-8 Microcantilevers with Integrated Piezoresistive Sensors for Parallel AFM Applications"
  MNE 2010 (September 2010)
• Y. Sarov, Tz. Ivanov, A. Frank, J-P. Zoellner, N. Nikolov, I. W. Rangelow,
  "Realization of cantilever arrays for parallel proximity imaging"
  poster presentation at the 16th international school on condensed matter physics, Progress in Solid State and Molecular Electronics, Ionics and Photonics , August 29th - September 3rd, 2010, Varna, Bulgaria.
• N. Nikolov, N. Kenarov, P. Popov, Y. Sarov, I. Rangelow, T. Gotszalk.
  Parallel proximity imaging by cantilever arrays. System Integration and Applications. Poster presentation, 16th International School of Condesed Matter Physics, Varna (2010)

• Y. Sarov et al.
  "Parallel proximal probe arrays with vertical interconnections"
  Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol. 27, p. 3132, 2009
• Y. Sarov; A. Frank; Tzv. Ivanov; J. Zöllner; K. Ivanova; B. Volland; I.W. Rangelow; A. Brogan; R. Wilson; P. Zawierucha; M. Zielony; T. Gotszalk; N. Nikolov; M. Zier; B. Schmidt; I. Kostic
  "Parallel Proximal Probe Arrays with Vertical Interconnections"
  J. Vac. Sci. Technol. B, 27 (2009) 3132-8.
• G. Bischoff, K. Druee, J. Mueller, Y. Sarov, A. Frank, J. Zoellner, T. Ivanov, I. W. Rangelow
  "Packaging of self-actuated piezoresistive cantilever-arrays"
  Proceedings of Mikrosystemtechnik Kongress 2009, 12. - 14. Oktober 2009 in Berlin, C VDE VERLAG GMBH, Berlin und Offenbach, Bismarkstraße 33, 10625 Berlin, ISBN 978-3-8007-3183-1 (2009) P08.14_1569199063- in German.
• M. Woszczyna, P. Zawierucha, M. Swiatkowski, T. Gotszalk, P. Grabiec, N. Nikolov, J. Mielczarski, E. Mielczarska, N. Glezos, Tzv. Ivanow, K. Ivanowa, Y. Sarov, I.W. Rangelow
  "Quantitative force and mass measurements using the cantilever with integrated actuator and deflection detector"
  Microelectronic Engineering 86 (2009) 1043-1045.
• M. Woszczyna, T. Gotszalk, P. Zawierucha, M. Zielony, Tzv. Ivanow, K. Ivanowa, Y. Sarov, N. Nikolov, J. Mielczarski, E. Mielczarska, I.W. Rangelow
  "Thermally driven piezoresistive cantilevers for shear-force microscopy"
  Microelectronic Engineering 86 (2009) 1212-1215.
• Y. Sarov, A. Frank, Tz. Ivanov, J-P. Zöllner, I.W. Rangelow
  "New generation cantilever arrays with vertical interconnections for large-scale parallel proximity surface scanning"
  proceedings of the 54th IWK (Internationales Wissenschaftliches Kolloquium), Workshop "PRONANO" Edited P. Scharff , TU-Ilmenau, 10 Sept. 2009 (2009) 1-15.
• T. Sulzbach, W. Engl, R. Maier, P. Besmens, D. Dontsov, E. Langlotz, W. Schott
  "Individually addressable cantilever arrays with integrated sharp tips for parallel surface scanning"
  presented at 54th IWK (Internationales Wissenschaftliches Kolloquium), Workshop "PRONANO", TU-Ilmenau, 10 Sept. 2009 (2009) 16.
• W. Schumann, B. Volland, I. W. Rangelow
  "Development of a plasma etching process for vertical interconnections using DoE"
  proceedings of the 54th IWK (Internationales Wissenschaftliches Kolloquium), Workshop "PRONANO" Edited P. Scharff , TU-Ilmenau, 10 Sept. 2009 (2009) 35.
• N. Nikolov, P.Popov, T. Gotszalk, M. Woszczyna, I. Rangelow
  "Self-oscillation technology in multicantilever scanning systems"
  Proceedings of the 54th IWK (Internationales Wissenschaftliches Kolloquium), Workshop "PRONANO", TU-Ilmenau, 10 Sept. 2009 (2009) 53.
• B. Schmidt, M. Zier, J. Potfajova
  "Ion implantation in AFM cantilever array fabrication"
  presented at 54th IWK (Internationales Wissenschaftliches Kolloquium), Workshop "PRONANO", TU-Ilmenau, 10 Sept. 2009 (2009) 63.
• I. Kostic, V. Barak, A. Bencurova, I. Caplovic, P. Hrkut, A. Konecnikova, L. Matay, P. Nemec, A. Ritomsky
  "E-beam lithography for photomask fabrication"
  proceedings of the 54th IWK (Internationales Wissenschaftliches Kolloquium), Workshop "PRONANO", TU-Ilmenau, 10 Sept. 2009 (2009) 71.

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Period covered: from 01-04-2008 to 31-03-2009

• I. Kostic, V. Barak, A. Bencurova, I. Caplovic, P. Hrkut, A. Konecnikova, L. Matay, P. Nemec, A. Ritomsky
  "E-beam lithography for photomask fabrication"
  presented at 54th IWK (Internationales Wissenschaftliches Kolloquium), Workshop „PRONANO”, TU-Ilmenau, 10 Sept. 2009
• B. Schmidt, M. Zier, J. Potfajova
  "Ion implantation in AFM cantilever array fabrication"
  presented at 54th IWK (Internationales Wissenschaftliches Kolloquium), Workshop „PRONANO”, TU-Ilmenau, 10 Sept. 2009
• N. Nikolov, P.Popov, T. Gotszalk, M. Woszczyna, I. Rangelow
  "Self-oscillation technology in multicantilever scanning systems"
  presented at 54th IWK (Internationales Wissenschaftliches Kolloquium), Workshop „PRONANO”, TU-Ilmenau, 10 Sept. 2009
• T. Sulzbach, W. Engl, R. Maier, P. Besmens, D. Dontsov, E. Langlotz, W. Schott
  "Individually addressable cantilever arrays with integrated sharp tips for parallel surface scanning", presented at 54th IWK (Internationales Wissenschaftliches Kolloquium), Workshop „PRONANO” "
  TU-Ilmenau, 10 Sept. 2009
• Y. Sarov, A. Frank, Tz. Ivanov, J.-P. Zöllner, Ivo W. Rangelow
  "New generation cantilever arrays with vertical interconnections for large-scale parallel proximity surface scanning"
  presented at 54th IWK (Internationales Wissenschaftliches Kolloquium), Workshop „PRONANO”, TU-Ilmenau, 10 Sept. 2009
• P. Zawierucha, M. Zielony, M. Woszczyna, T. Gotszalk, Y. Sarov, A. Frank, Tz. Ivanov, J-P. Zöllner, Ivo W. Rangelow
  "Parallel imaging with micromachined thermally driven piezoresistive proximal probes"
  poster presentation at 53rd International Conference On Electron, Ion, And Photon Beam Technology & Nanofabrication, Marco Island, USA, May 26 – May 29, 2009
• Y. Sarov, A. Frank, Tzv. Ivanov, J-P. Zöllner, K. Ivanova, B. Volland, I.W. Rangelow, A. Brogan, R.Wilson, P. Zawierucha, M. Zielony, T. Gotszalk, N. Nikolov, M. Zier, B. Schmidt, I. Kostic
  "Parallel Proximal Probe Arrays with Vertical Interconnections"
  poster presentation at 53rd International Conference On Electron, Ion, And Photon Beam Technology & Nanofabrication, Marco Island, USA, May 26 – May 29, 2009

• Y. Sarov, Tzv. Ivanov, A. Frank, B.E. Volland, I.W. Rangelow
  "Controllable Pre-deflection of Scanning Proximity Probes Arrays"
  Applied Physics A - Materials Science & Processing, 9. May 2008

• K. Ivanova, Y. Sarov, Tzv. Ivanov, A. Frank, J.-P. Zöllner, Ch. Bitterlich, U. Wenzel, B.E. Volland, S. Klett ,I.W. Rangelow, P. Zawierucha, M. Zielony , T. Gotszalk, D.  Dontzov ,W. Schott, N. Nikolov, M. Zier, B. Schmidt, W. Engl, T. Sulzbach and I. Kostic
  "Scanning proximal probes for parallel imaging and lithography"
  J. Vac. Sci. Technol. B 26(6), Nov/Dec 2008, pp. 2367-2373

• N. Nikolov, N. Kenarov, P. Popov, Th. Gotszalk and I.W. Rangelow
  "All-digital PLL System for Self-oscillation Mode of Microcantilevers with Integrated Bimorph Actuator and Piezoresistive Readout"
  Sensors & Transducers Journal, Vol. 98, Issue 11, November 2008, pp. 45-53

• A.Frank, J.-P. Zöllner, Y. Sarov, Tz. Ivanov, St. Klett, T. Gotszalk, M. Zielony, P. Zawierucha, B. Schmidt, M. Zier, M. Nikolov, W. Engl, T. Sulzbach, D. Dontsov, E. Langlotz, W. Schott and I.W. Rangelow
  "Investigation of Crosstalk in Cantilever Arrays"
  Proceedings Eurosensors / XXII, Dresden, Germany, pp. 744-747, 2008

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Period covered: from 01-04-2007 to 31-03-2008

• A. Frank, J.-P. Zöllner, Y. Sarov, Tz. Ivanov, S. Klett and I. W. Rangelow, M. Swiatkowski and T. Gotszalk, N. Nikolov
  "Compact Modelling of Electrical, Mechanical and Thermal Behaviour for MEMS with SPICE"
  accepted presentation at MRS Spring Meeting 2008, San Francisco, USA, 24-28.03.2008

• Wolfgang Engl, Thomas Sulzbach and Reinhard Maier
  „PRONANO - Active Cantilever Arrays for Parallel Atomic Force Microscopy”
  Nanomechanical Cantilever Sensors (NMC), Mainz, Germany, May 19-21, 2008

• Denis Dontsov, Enrico Langlotz, Walter Schott, Tino Hausotte, Eberhard Manske and Gerd Jäger
  “High precision platform for testing of the multi-sensor array parameters”
  Nanomechanical Cantilever Sensors (NMC), Mainz, Germany, May 19-21, 2008

• Teodor Gotszalk (Wroclaw University of Technology), I. W. Rangelow (TU Ilmenau), T. Sulzbach (Nanowold)
  “PRONANO cantilevers-principle of piezoresitive detection of cantilever bending & thermal actuation of tip deflection”
  Nanomechanical Cantilever Sensors (NMC), Mainz, Germany, May 19-21, 2008

• T. Gotszalk (WRUT) + consortium members
  “Application of self-actuated 32 cantilever array in atomic force surface measurements”
  MNE 2008, Athens, Greece, September 15-18, 2008

• R. Dunn, R. Ibbotson, S. E. Huq
  “Polyimide Based Bimorph Microcantilever Arrays with Integrated Actuation and Sensors”
  MNE 2008, Athens, Greece, September 15-18, 2008

• " Piezoresistive and Self-Actuated 128-Cantilever Arrays for Nanotechnology Applications"
  I.W. Rangelow, Tzv. Ivanov , K. Ivanova, B.E. Volland, Y. Sarov, A. Persaud, H.P. Reithmaier, T. Gotszalk, P. Zawierucha, M. Zielony, D. Dontzov, B. Schmidt, M. Zier, N. Nikolov, I. Kostic, W. Engl, T. Sulzbach, J. Mielczarski, S. Kolb, Du P. Latimier, R. Pedreau, V. Djakov, S.E. Huq, K. Edinger, O. Fortagne, A. Almansa, H-O. Blom
  MEE 84 5-8 (2007) 1260-1264

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Period covered: from 01-04-2005 to 31-03-2006

• Z. Rozynek, N. Zhang, S. Serra, A. Almansa, P. Castillo, V. Djacov, E.Huq.
  "Integration and packaging of micro-devices with vertical interconnection and simulation of thermal management"
  The International Workshop on Micro- and Nanotechnologies and Systems, 17-18 October 2007, Moscow

• A. Frank, J.-P. Zoellner, Y. Sarov, Tz. Ivanov, I. W. Rangelow, M. Swiatkowski, T. Gotszalk, N. Nikolov,
  M. Zier and B. Schmidt,
  "SPICE simulations of self-actuated piezoresistive cantilever arrays"
  Micro- and Nano-Engineering, 23-26 September 2007, Copenhagen

• Y. Sarov, Tzv. Ivanov, A. Frank, B.E. Volland, I.W. Rangelow
  "Controllable Pre-deflection of Scanning Proximity Probes Arrays"
  Micro- and Nano-Engineering, 23-26 September 2007, Copenhagen

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Period covered: from 01-04-2005 to 31-03-2006
During the first period a remarkable progress towards the overall aim of massively parallel addressable cantilever arrays have been achieved. First working arrays of up to 4x32 cantilevers have been realized (Uni Kassel) enabling experiments focussing on the fundamental understanding of parallel operation of cantilevers... read full text »

• Rangelow, I.W. and other;
  Piezoresistive and Self-Actuated 128-Cantilever Arrays for Nanotechnology Applications
  Micro- and Nano-Engineering, 17 - 20 September 2006, Barcelona
• Zier,M. and other
  Ultra-shallow pn-junction fabrication for piezoresistive AFM deflection sensors
  Micro- and Nano-Engineering, 17 - 20 September 2006, Barcelona
• "Raster-Sonden-Mikroskopie mit Cantilever-Arays"
  I. W. Rangelow, T. Ivanov, B. Volland, D. Donstov, Y. Sarov, K. Ivanova, A. Persaud, D. Filenko,
  N. Nikolov, B. Schmidt, M. Zier, T. Gotszalk, T. Sulzbach
  Techn. Mess. 73 (2006) 485-492 - in German.

• E. Mielczarski, J.A. Mielczarski
  "Composition and structure of thin films. Spectral simulation and experimental results"
  European Materials Research Society Spring Meeting, May 31 - June 3 2005, Strasbourg
• T. Sulzbach
  "PRONANO - Technology for the Production of Massively Parallel Intelligent Cantilever - Probe Platforms for Nanoscale Analysis and Synthesis"
  Conference on Advanced Manufacturing, 15 - 17 November 2005, Leuven