• "Controllable Pre-deflection of Scanning Proximity Probes Arrays"
  Y. Sarov, Tzv. Ivanov, A. Frank, B.E. Volland, I.W. Rangelow
  New J. Phys. - submitted (2008)
• "Compact Modelling of Electrical, Mechanical and Thermal Behaviour for MEMS with SPICE"
  A. Frank, J.-P. Zöllner, Y. Sarov, Tz. Ivanov, S. Klett and I. W. Rangelow, M. Swiatkowski and T. Gotszalk, N. Nikolov
  submitted to MRS Proceedings (2008)
• "Parasitic effects in self-actuated piezoresistive cantilever arrays"
  A. Frank, J.-P. Zöllner, Y. Sarov, Tz. Ivanov, and I. W. Rangelow, M. Swiatkowski and T. Gotszalk, N. Nikolov
  in preparation (2008)

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Period covered: from 01-04-2007 to 31-03-2008

• A. Frank, J.-P. Zöllner, Y. Sarov, Tz. Ivanov, S. Klett and I. W. Rangelow, M. Swiatkowski and T. Gotszalk, N. Nikolov
  "Compact Modelling of Electrical, Mechanical and Thermal Behaviour for MEMS with SPICE"
  accepted presentation at MRS Spring Meeting 2008, San Francisco, USA, 24-28.03.2008

• "Raster-Sonden-Mikroskopie mit Cantilever-Arays"
  I. W. Rangelow, T. Ivanov, B. Volland, D. Donstov, Y. Sarov, K. Ivanova, A. Persaud, D. Filenko,
  N. Nikolov, B. Schmidt, M. Zier, T. Gotszalk, T. Sulzbach
  Techn. Mess. 73 (2006) 485-492 - in German.
• " Piezoresistive and Self-Actuated 128-Cantilever Arrays for Nanotechnology Applications"
  I.W. Rangelow, Tzv. Ivanov , K. Ivanova, B.E. Volland, Y. Sarov, A. Persaud, H.P. Reithmaier, T. Gotszalk, P. Zawierucha, M. Zielony, D. Dontzov, B. Schmidt, M. Zier, N. Nikolov, I. Kostic, W. Engl, T. Sulzbach, J. Mielczarski, S. Kolb, Du P. Latimier, R. Pedreau, V. Djakov, S.E. Huq, K. Edinger, O. Fortagne, A. Almansa, H-O. Blom
  MEE 84 5-8 (2007) 1260-1264
• "SPICE simulations of self-actuated piezoresistive cantilever arrays"
  A. Frank, J.-P. Zoellner, Y. Sarov, Tz. Ivanov, I. W. Rangelow, M. Swiatkowski, T. Gotszalk, N. Nikolov,
  M. Zier and B. Schmidt,
  MicroElectr. Eng. (submitted 2007)
• "Controllable Pre-deflection of Scanning Proximity Probes Arrays"
  Y. Sarov, Tzv. Ivanov, A. Frank, B.E. Volland, I.W. Rangelow,
  MicroElectr. Eng. (submitted 2007)

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Period covered: from 01-04-2005 to 31-03-2006

• Z. Rozynek, N. Zhang, S. Serra, A. Almansa, P. Castillo, V. Djacov, E.Huq.
  "Integration and packaging of micro-devices with vertical interconnection and simulation of thermal management"
  The International Workshop on Micro- and Nanotechnologies and Systems, 17-18 October 2007, Moscow
• A. Frank, J.-P. Zoellner, Y. Sarov, Tz. Ivanov, I. W. Rangelow, M. Swiatkowski, T. Gotszalk, N. Nikolov,
  M. Zier and B. Schmidt,
  "SPICE simulations of self-actuated piezoresistive cantilever arrays"
  Micro- and Nano-Engineering, 23-26 September 2007, Copenhagen
• Y. Sarov, Tzv. Ivanov, A. Frank, B.E. Volland, I.W. Rangelow
  "Controllable Pre-deflection of Scanning Proximity Probes Arrays"
  Micro- and Nano-Engineering, 23-26 September 2007, Copenhagen

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Period covered: from 01-04-2005 to 31-03-2006
During the first period a remarkable progress towards the overall aim of massively parallel addressable cantilever arrays have been achieved. First working arrays of up to 4x32 cantilevers have been realized (Uni Kassel) enabling experiments focussing on the fundamental understanding of parallel operation of cantilevers... read full text »

• Rangelow, I.W. and other;
  Piezoresistive and Self-Actuated 128-Cantilever Arrays for Nanotechnology Applications
  Micro- and Nano-Engineering, 17 - 20 September 2006, Barcelona
• Zier,M. and other
  Ultra-shallow pn-junction fabrication for piezoresistive AFM deflection sensors
  Micro- and Nano-Engineering, 17 - 20 September 2006, Barcelona

• E. Mielczarski, J.A. Mielczarski
  "Composition and structure of thin films. Spectral simulation and experimental results"
  European Materials Research Society Spring Meeting, May 31 - June 3 2005, Strasbourg
• T. Sulzbach
  "PRONANO - Technology for the Production of Massively Parallel Intelligent Cantilever - Probe Platforms for Nanoscale Analysis and Synthesis"
  Conference on Advanced Manufacturing, 15 - 17 November 2005, Leuven